Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate
2007-01-16
2009-10-06
Berman, Jack I (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
C250S307000, C250S306000, C250S309000
Reexamination Certificate
active
07598492
ABSTRACT:
A method for improving throughput in review of images from a charged particle beam microscopy tool and a charged particle beam microscopy tool are disclosed.
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Krzeczowski Kenneth J.
Lent Mathew H.
Nasser-Ghodsi Mehran
Berman Jack I
Isenberg Joshua D.
JDI Patent
KLA-Tencor Technologies Corporation
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