Charged particle microscopy using super resolution

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C250S307000, C250S306000, C250S309000

Reexamination Certificate

active

07598492

ABSTRACT:
A method for improving throughput in review of images from a charged particle beam microscopy tool and a charged particle beam microscopy tool are disclosed.

REFERENCES:
patent: 4948971 (1990-08-01), Vogen et al.
patent: 5814814 (1998-09-01), Kanemitsu et al.
patent: 6043490 (2000-03-01), Sakai
patent: 6770879 (2004-08-01), Azordegan et al.
patent: 2007/0019887 (2007-01-01), Nestares et al.
S. Farsiu: “Advances and Challenges in Super-Resolution”, International Journal of Imaging Systems and Technology, Special Issue on High Resolution Image Rescontruction, vo. 14, pp. 47-57, Wiley Periodicals, Inc., 2004.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Charged particle microscopy using super resolution does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Charged particle microscopy using super resolution, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Charged particle microscopy using super resolution will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-4136795

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.