Charged particle microscope

Details Charged particle microscope Charged particle microscope

1993-11-17

1995-11-14

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250397, H01J 3726

Patent

active

054669367

ABSTRACT:
A charged particle electron microscope comprises: a sample chamber to which a gas used for gas amplification is supplied; a charged particle irradiation means for irradiating a sample set in the sample chamber with a charged particle beam; at least one first electrode member provided inside the sample chamber to which a first voltage is applied; at least one second electrode member provided inside the sample chamber to which a second voltage different from the first voltage is applied; a high voltage power source control means for controlling the first and the second voltages; and a synthesizer for synthesizing a current signal obtained from the first electrode member and a current signal obtained from the second electrode member, wherein the sample is observed by using a synthetic signal output from the synthesizer as a picture signal.

REFERENCES:
patent: 4785182 (1988-11-01), Mancuso et al.
patent: 4880976 (1989-11-01), Mancuso et al.
patent: 4897545 (1990-01-01), Danilatos
patent: 4992662 (1991-02-01), Danilatos
patent: 5097134 (1992-03-01), Kimoto et al.
patent: 5396067 (1995-03-01), Suzuki et al.

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