Charged particle guide

Details Charged particle guide Charged particle guide

2006-11-14

2006-11-14

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S306000, C250S311000, C250S397000

Reexamination Certificate

active

07135678

ABSTRACT:
A charged particle guide adapted to be coupled with a charged particle detector, such as a secondary electron detector. The charged particle guide, in one example, comprising two wires extending from the charged particle detector toward a source of charged particles, such as secondary electrons emitted from an IC upon application of a focused ion beam. Upon application of a bias voltage, the charged particle guide introduces a collecting electric field that attracts charged particles and directs the charged particles to the charged particles detector.

REFERENCES:
patent: 4588890 (1986-05-01), Finnes
patent: 4680468 (1987-07-01), Bouchard et al.
patent: 5097127 (1992-03-01), Hildenbrand et al.
patent: 5362964 (1994-11-01), Knowles et al.
patent: 6344115 (2002-02-01), Azuma et al.
patent: 6630667 (2003-10-01), Wang et al.
patent: 6646262 (2003-11-01), Todokoro et al.
“Yttrium Silicate—Cerium Doped P47” Applied Scintillation Technologies, located at www/appscintech.com, Nov. 30, 2000.

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