Charged particle detection device and charged particle radiation

Details Charged particle detection device and charged particle radiation Charged particle detection device and charged particle radiation

1994-09-19

1996-02-13

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

25037014, 250397, 257429, H01J 37244

Patent

active

054913390

ABSTRACT:
According to this invention, there is provided a charged particle detection device including a semiconductor substrate, an insulating film formed on the semiconductor substrate, an electrode formed on the insulating film, a member for forming a potential well, which is constituted by a depletion layer, near a surface of the semiconductor substrate under the electrode, a member for sweeping, into the semiconductor substrate, charges which are generated in the semiconductor substrate by charged particles incident from the electrode and are stored in the potential well, and a member for detecting signal charges generated by the charged particles swept into the semiconductor substrate.

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Soji Manabe, et al., "A 2-Million-Pixel CCD Image Sensor Overlaid with an Amorphous Silicon Photoconversion Layer," IEEE Transactions on Electron Devices, vol. 38, No. 8, pp. 1765-1771, Aug. 1991.

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