Charged particle beam structure having electrostatic coarse and

Details Charged particle beam structure having electrostatic coarse and Charged particle beam structure having electrostatic coarse and

1979-11-09

1982-08-03

Blum, Theodore M.

Electric lamp and discharge devices: systems

Cathode ray tube circuits

Cathode-ray deflections circuits

H01J 2970, H01J 2974

Patent

active

043429491

ABSTRACT:
An electron beam or other charged particle beam tube of the compound fly's eye type having a coarse deflection system is described. The beam tube comprises an evacuated housing together with an electron gun or other charged particle beam producing means disposed at one end of the evacuated housing for producing a beam of electrons or other charged particles. A coarse deflector, a compound micro lens assembly, and a fine deflector are disposed in the housing in the path of the electron or other charged particle beam for first selecting a lenslet and thereafter finely deflecting an electron or other charged particle beam to a desired spot on a target plane. The electron or other charged particle beam tube is designed in a manner such that the electron or other charged particle beam is caused to diverge at a small angle of divergence in advance of passing through the coarse deflector by appropriately locating the virtual origin or point source of the charged particle a small distance in advance of the coarse deflector.
In addition, a dynamic focusing correction potential is supplied to the micro lens assembly along with a high voltage energizing potential with the dynamic focusing correction potential being derived from components of both the coarse deflection potentials and the fine deflection potentials.

REFERENCES:
patent: 3319110 (1967-05-01), Schlesinger
patent: 3417199 (1968-12-01), Yoshida et al.
patent: 4142132 (1979-02-01), Harte

Affiliated with

Also associated with

Rating

Charged particle beam structure having electrostatic coarse and does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Charged particle beam structure having electrostatic coarse and , we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Charged particle beam structure having electrostatic coarse and will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1469813