Charged particle beam scanning method and charged particle...

Details Charged particle beam scanning method and charged particle... Charged particle beam scanning method and charged particle...

2011-05-03

2011-05-03

Nguyen, Kiet T (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S3960ML

Reexamination Certificate

active

07935925

ABSTRACT:
In a method of scanning a charged particle beam which can position the scan position to a proper location inside a deflectable range of the scan position of charged particle beam, the scan position of charged particle beam is deflected to a plurality of target objects inside a scan position deflectable region and on the basis of a shift of a target object at a scan location after deflection, the deflection amount at the scan location is corrected.

REFERENCES:
patent: 5334846 (1994-08-01), Nakano et al.
patent: 6420700 (2002-07-01), Ooaeh et al.
patent: 2006/0219907 (2006-10-01), Ogashiwa et al.

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