Charged particle beam scanning device

Details Charged particle beam scanning device Charged particle beam scanning device

1981-10-20

1984-03-27

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250397, H01J 3726

Patent

active

044396813

ABSTRACT:
A charged particle beam scanning device is provided with two coordinates conversion circuits. For rotating the scanning direction of the charged particle beam, one of the coordinates conversion circuit is connected between a scanning signal generator and a magnification circuit, the output of which is supplied to a deflecting means for scanning the charged particle beam over the specimen surface, as in the case of a conventional device. Another coordinates conversion circuit is used for keeping independent operation of the image rotation and the image shift. This coordinates conversion circuit converts the output signal of a d.c. signal generator for image shift, and the converted signal is added to the input signal of the said magnification circuit.

REFERENCES:
patent: 3795808 (1974-03-01), Drayton et al.
patent: 3900734 (1975-08-01), Kynaston et al.
patent: 4057722 (1977-11-01), Hieke

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