Radiant energy – Inspection of solids or liquids by charged particles
Reexamination Certificate
2011-03-08
2011-03-08
Wells, Nikita (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
C250S310000, C250S311000, C250S3960ML
Reexamination Certificate
active
07902504
ABSTRACT:
A charged particle beam reflector device is configured to include at least two electrostatic mirrors arranged with a predetermined interval on a linear optical axis, each having a through hole through which a charged particle beam radiated from an electron gun along a linear optical axis passes, and having a function of reflecting the charged particle beam or allowing the charged particle beam to pass through the through hole in accordance with an applied voltage, and a controller controlling an applied voltage to the at least two electrostatic mirrors. The controller applies, to each of the electrostatic mirrors, a reflection voltage allowing the electrostatic mirrors to reflect the charged particle beam at a predetermined timing so that the charged particle beam from the electron gun is reflected by the at least two electrostatic mirrors a plurality of times.
REFERENCES:
patent: 5319207 (1994-06-01), Rose et al.
patent: 7714285 (2010-05-01), Barnard
patent: 2010/0065753 (2010-03-01), Enyama et al.
patent: 3269575 (2002-01-01), None
Koike Hirotami
Okada Shin-ichi
Kabushiki Kaisha Topcon
Wells Nikita
Wenderoth , Lind & Ponack, L.L.P.
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