Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate
2008-07-30
2010-12-14
Berman, Jack I (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
C250S311000, C250S307000, C250S309000, C250S3960ML
Reexamination Certificate
active
07851756
ABSTRACT:
It is to prevent an image drift from occurring caused by a specimen being charged when observing the specimen including an insulating material.A first scan is performed in a predetermined direction on scanning line and in a predetermined sequential direction of scanning lines and a second scan is performed in a scanning direction different from the predetermined scanning direction and in a sequential direction different from the predetermined sequential direction. An image may be created by repeating the process of executing the second scan after executing the first scan and by requiring the arithmetic average of the frames obtained by the second scans. An image may be created by averaging arithmetically at least one frame obtained by the first scan and at least one frame obtained by the second scan.
REFERENCES:
patent: 5302828 (1994-04-01), Monahan
patent: 7187345 (2007-03-01), Kobaru et al.
patent: 2005-142038 (2005-06-01), None
John C. Russ, Computer-Assisted Microscopy; Plenum Publishing Corp. New York 1990; pp. 40-41.
David Joy, “Charge Control During Photomask Critical Dimension (CD) Metrology”, International Sematech, Technology Transfer #03114452B-ENG, Feb. 27, 2004, pp. 1-12.
Fukaya Ritsuo
Wang Zhigang
Berman Jack I
Crowell & Moring LLP
Hitachi High-Technologies Corporation
Sahu Meenakshi S
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