Charged particle beam equipment and charged particle microscopy

Details Charged particle beam equipment and charged particle microscopy Charged particle beam equipment and charged particle microscopy

2005-12-14

2008-10-14

Berman, Jack I. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S306000, C250S307000, C250S309000, C250S311000, C702S085000

Reexamination Certificate

active

07435957

ABSTRACT:
On the basis of a displacement of the field of view before and after a deflection of a charged particle beam, extracted from a first specimen image, including a displacement of the field of view recorded by causing a charged particle beam to deflect by a predetermined amount by a beam deflector in an image in which a specimen image is captured at a first magnification calibrated by using a specimen enlarged image of a specimen as a magnification standard, and also a displacement of the field of view before and after a deflection of the charged particle beam, extracted from a second specimen image, including a displacement of the field of view recorded by causing a charged particle beam to deflect by the predetermined amount by the beam deflector in an image in which a specimen image is captured at a second magnification, the second magnification is calibrated.

REFERENCES:
patent: 6791084 (2004-09-01), Shimoma et al.
patent: 6797965 (2004-09-01), Abe
patent: 6838667 (2005-01-01), Tsuneta et al.
patent: 2002/0056808 (2002-05-01), Tsuneta et al.
patent: 2003/0201393 (2003-10-01), Tsuneta et al.
patent: 2005/0189501 (2005-09-01), Sato et al.
patent: 2002-15691 (2002-01-01), None
patent: 2002015691 (2002-01-01), None
patent: 2005209488 (2005-08-01), None

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