Charged particle beam equipment

Details Charged particle beam equipment Charged particle beam equipment

2008-05-20

2008-05-20

Kim, Robert (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S306000, C250S307000, C250S309000, C250S311000, C702S085000

Reexamination Certificate

active

11396654

ABSTRACT:
Charged particle beam equipment has a processing unit for calibrating dimension values of an enlarged specimen image, and means for changing the amount by which a charged particle beam is scanned. Also, a specimen stand has a mechanism for holding a specimen having a periodical structure or a specimen simultaneously having a periodical structure and a non-periodica structure, and a storage device for automatically changing a magnification for an enlarged specimen image, and storing measured values at all magnifications.

REFERENCES:
patent: 6596993 (2003-07-01), Sicignano et al.
patent: 2003/0039386 (2003-02-01), Ishitani et al.
patent: 2005/0189501 (2005-09-01), Sato et al.
patent: 2006/0151697 (2006-07-01), Inada et al.
patent: 2002-15691 (2002-01-01), None

Affiliated with

Also associated with

Rating

Charged particle beam equipment does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Charged particle beam equipment, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Charged particle beam equipment will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3959066