Charged particle beam apparatus and it's operating method

Details Charged particle beam apparatus and it's operating method Charged particle beam apparatus and it's operating method

1993-06-01

1995-02-28

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

250307, 250397, H01J 3726

Patent

active

053939778

ABSTRACT:
A specimen is scanned with an electron beam so as to generate a signal characteristic of the specimen to thereby produce an image thereof on the basis of the generated signal. A memory is provided for storing operating conditions of a scanning electron microscope which are associated with identification information for specifying the specimen. The identification information is designated so that thereby at least one operating condition corresponding to the designated identification information is read out from the memory, and the read out operating condition is automatically set so that the scanning electron microscope is operated under the set operating condition.

REFERENCES:
patent: 3748467 (1973-07-01), Suganuma
patent: 3833811 (1974-09-01), Koike et al.

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