Charged particle beam apparatus and charged particle beam...

Details Charged particle beam apparatus and charged particle beam... Charged particle beam apparatus and charged particle beam...

2005-10-18

2005-10-18

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S309000, C250S3960ML, C250S3960ML

Reexamination Certificate

active

06956211

ABSTRACT:
A charged particle beam apparatus produces little reduction in resolution when the beam is inclined with respect to a sample. The trajectory of a primary beam4is deflected by a deflector or changed by a movable aperture such that the beam is incident on a plurality of lenses6and7off the axes thereof. A means is provided to control the off-axis trajectory of the beam such that an aberration produced by the objective lens7when the beam is inclined can be canceled by an aberration produced by the other lens6.

REFERENCES:
patent: 4393310 (1983-07-01), Hahn
patent: 4618766 (1986-10-01), van der Mast et al.
patent: 4983832 (1991-01-01), Sato
patent: 5221844 (1993-06-01), van der Mast et al.
patent: 5373158 (1994-12-01), Murakoshi et al.
patent: 5512747 (1996-04-01), Maeda
patent: 5627373 (1997-05-01), Keese
patent: 6538249 (2003-03-01), Takane et al.
patent: 6586753 (2003-07-01), Wada
patent: 6653632 (2003-11-01), Kazumori
patent: 6677585 (2004-01-01), Nomura
patent: 6740877 (2004-05-01), Sawahata et al.
patent: 1 235 251 (2002-08-01), None
patent: 55-48610 (1953-09-01), None
patent: 02-033843 (1990-02-01), None
patent: 2000-348658 (2000-12-01), None
patent: 2001-015055 (2001-01-01), None
patent: WO 01/33603 (2001-05-01), None

Affiliated with

Also associated with

Rating

Charged particle beam apparatus and charged particle beam... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Charged particle beam apparatus and charged particle beam..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Charged particle beam apparatus and charged particle beam... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3458293