Charged-particle beam apparatus

Details Charged-particle beam apparatus Charged-particle beam apparatus

1990-10-10

1992-09-22

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

25044211, 250396ML, H01J 3720

Patent

active

051499673

ABSTRACT:
The charged-particle beam apparatus according to this invention is of the type in which a specimen is inserted between the upper and lower magnetic poles of an objective lens, and is constructed such that stages, which are used to move a specimen in a desired direction, are mounted one on top another from the bottom wall of the objective lens, thus preventing the specimen from being affected by external vibration. Devices, which do not generate a magnetic field, are used to drive the stages. This enables the drive devices to be directly connected to the stages, so that the stages are moved accurately.

REFERENCES:
patent: 3629577 (1971-12-01), Weber et al.
patent: 3778621 (1973-12-01), Mikajiri
patent: 3952215 (1976-04-01), Sakitani
patent: 4798989 (1989-01-01), Miyazaki et al.
patent: 4818874 (1989-04-01), Ishikawa
patent: 4866280 (1989-09-01), Ohtaka
Van Nostrand's Scientific Encyclopedia, Fifth Edition, 1976, pp. 2349-2350.

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