Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Reexamination Certificate
2007-05-23
2011-12-06
Berman, Jack (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Analyte supports
C250S441110, C250S310000, C250S307000, C134S001300
Reexamination Certificate
active
08071961
ABSTRACT:
A sample measuring method and a charged particle beam apparatus are provided which remove contaminants, that have adhered to a sample in a sample chamber of an electron microscope, to eliminate adverse effects on the subsequent manufacturing processes. To achieve this objective, after the sample measurement or inspection is made by using a charged particle beam, contaminants on the sample are removed before the next semiconductor manufacturing process. This allows the contaminants adhering to the sample in the sample chamber to be removed and therefore failures or defects that may occur in a semiconductor fabrication process following the measurement and inspection can be minimized.
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Kato Kazuo
Kudo Tomohiro
Mito Hiroaki
Saeki Tomonori
Sasada Katsuhiro
Antonelli, Terry Stout & Kraus, LLP.
Berman Jack
Hitachi High-Technologies Corporation
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