Charged particle beam apparatus

Details Charged particle beam apparatus Charged particle beam apparatus

2008-02-06

2010-12-07

Vanore, David A (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S311000, C250S3960ML, C250S3960ML, C250S492100, C250S492220, C250S491100

Reexamination Certificate

active

07847249

ABSTRACT:
A technology whereby removal of magnetic hysteresis is enabled in short time in parallel with a process for stage transfer, and so forth. There is executed a magnetic hysteresis removal sequence whereby current for exciting an electromagnetic coil prior to acquisition of an image is always set to a predetermined variation value against a target value, thereby obtaining information on an image, and so forth, when a diameter of a primary electron beam, converged on the specimen, becomes smaller than dimensions displayed by one pixel of an image to be acquired.

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