Charged particle beam apparatus

Details Charged particle beam apparatus Charged particle beam apparatus

2006-11-15

2009-12-15

Vanore, David A (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S306000, C250S307000, C250S492220

Reexamination Certificate

active

07633063

ABSTRACT:
A charged particle beam apparatus is provided which can prevent the accuracy of positional shift detection from being degraded owing to differences in picture quality, so that even when the state of a charged particle beam is changed at the time that optical conditions are changed or the optical axis changes with time, an auto adjustment of the optical axis can be realized easily and highly accurately. In the charged particle beam apparatus, evaluation or adjustment of focusing is conducted before the deflection condition of an alignment deflector for optical axis adjustment is changed or a table of focus adjustment amounts in correspondence with deflection conditions of the alignment deflector is provided, whereby when the deflection condition of the alignment deflector is changed, a focus adjustment is carried out in accordance with the table.

REFERENCES:
patent: 6838667 (2005-01-01), Tsuneta et al.
patent: 6864493 (2005-03-01), Sato et al.
patent: 2002-352758 (2002-12-01), None
patent: 2003-22771 (2003-01-01), None

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