Charged particle beam apparatus

Details Charged particle beam apparatus Charged particle beam apparatus

2007-04-24

2007-04-24

Nguyen, Kiet T. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S305000, C250S505100, C378S034000

Reexamination Certificate

active

11437717

ABSTRACT:
The charged particle beams is provided, which can analyze contamination of the inner wall of the system without being disassembled and supply information on appropriate maintenance timing. The contamination level of the inner wall of the system is identified by measuring the spectrum of the X-rays emitted from the inner wall due to irradiation of a charged particle beam or a recoil electron.

REFERENCES:
patent: 6545272 (2003-04-01), Kondo
patent: 7064324 (2006-06-01), Onishi
patent: 9-245716 (1997-09-01), None
patent: 2002-248338 (2002-09-01), None

Affiliated with

Also associated with

Rating

Charged particle beam apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Charged particle beam apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Charged particle beam apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3764820