Charged particle beam apparatus

Details Charged particle beam apparatus Charged particle beam apparatus

1975-03-31

1976-02-10

Borchelt, Archie R.

Radiant energy

Inspection of solids or liquids by charged particles

Methods

250396R, H01J 3726

Patent

active

039379582

ABSTRACT:
A charged particle beam (e.g., ions or electrons) apparatus including two electrostatic focusing lenses and an electrode having a diameter limiting aperture positioned between the lenses is further provided with two electrode assemblies which interact with an extractor electrode and with a source of charged particles such that the trajectories of the particles in the beam passing through the second of the two assemblies are substantially parallel. This feature and other disclosed improvements facilitate the production of a substantially monoenergetic beam which under a first set of conditions can be focused to provide a small-diameter, spherical-aberration limited beam and which under another set of conditions, can be focused to provide a high current beam.

REFERENCES:
patent: 2422807 (1947-06-01), Smith
patent: 3840743 (1974-10-01), Tamura et al.

Affiliated with

Also associated with

Rating

Charged particle beam apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Charged particle beam apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Charged particle beam apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-152132