Charged-particle analyzer

Details Charged-particle analyzer Charged-particle analyzer

1977-06-28

1979-01-16

Dixon, Harold A.

Radiant energy

Inspection of solids or liquids by charged particles

Methods

250305, 250310, H01J 3900, G01M 2300

Patent

active

041350880

ABSTRACT:
A charged-particle beam correction arrangement for a charged-particle analyzer having deflecting electrodes which focus charged particles emitted from a sample onto a center axis, an extension thereof, or onto an identical circumference with its center on the axis, a slit which is disposed at the focus point, and an energy analyzer whose object point lies at the focus point. The charged-particle beam correction arrangement is disposed axially symmetrically in the vicinity of the path of the charged particles between the sample and the slit to correct a deformation in the focusing of the charged-particle beam. BACKGROUND OF THE INVENTION

REFERENCES:
patent: 3691341 (1972-09-01), Roiron
patent: 3742214 (1973-06-01), Helmer et al.
patent: 3942012 (1976-03-01), Boux

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