Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2006-04-18
2006-04-18
Toatley, Jr., Gregory J. (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
C356S516000, C356S521000
Reexamination Certificate
active
07030997
ABSTRACT:
Aberrations in a lens and lens system are identified by projecting an optical beam through a mask having an opening (probe) and a surrounding open geometry (pattern) and through the lens to an image plane. Lens aberrations are identified from the combined intensity of the beam in the image plane. In one embodiment the pattern is a plurality of rings concentric with the probe. Spillover between the probe and the geometry becomes intermixed in passing through the lens and alters the light intensity in the image plane. Vision of a patient can be tested by providing a plurality of probe openings and surrounding geometries that are illuminated. The patient then compares the images for brighter and darker probes as a measure of pupil aberrations. Areas in an integrated circuit mask layout impacted by aberrations in projection printing can be identified by sequentially comparing an aberration function to a mask layout, which can then be used to modify the mask layout.
REFERENCES:
patent: 5828455 (1998-10-01), Smith et al.
patent: 5978085 (1999-11-01), Smith et al.
patent: 6368763 (2002-04-01), Dirksen et al.
Imai, Akira et al., “Lens aberration measurement technique using attenuated phase-shifting mask”Proceedings of the SPIE—The International Society of Optical Engineering,C.J. Progler, Editor, vol. 4000, pt. 102, (Optical Microlithography XIII, Santa Clara, CA, USA, Mar. 1-3, 2000) pp. 1260-1268.
Adam Kostas
Gennari Frank E.
Neureuther Andrew R.
Robins Garth C.
Beyer Weaver & Thomas LLP
Merlino Amanda
The Regents of the University of California
Toatley , Jr. Gregory J.
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