Characterization array and method for determining threshold...

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element

Reexamination Certificate

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C324S763010, C324S765010

Reexamination Certificate

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07423446

ABSTRACT:
A method for determining threshold voltage variation rapidly provides accurate threshold voltage distribution values for process verification and improvement. The method operates a characterization away including a circuit for imposing a fixed drain-source voltage and a constant channel current at individual devices within the array, while sensing the source voltage of the individual device. The statistical distribution of the threshold voltage is determined directly from the source voltage distribution by offsetting each source voltage by a value determined by completely characterizing one or more devices within the array. The resulting methodology avoids the necessity of otherwise characterizing each device within the array, thus reducing measurement time dramatically.

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U.S. Appl. No. 11/422,913, filed Jun. 8, 2006, Agarwal et al.

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