Static information storage and retrieval – Floating gate – Particular biasing
Reexamination Certificate
2002-01-22
2002-12-31
Phan, Trong (Department: 2818)
Static information storage and retrieval
Floating gate
Particular biasing
C365S185270, C365S185290, C257S315000, C257S316000
Reexamination Certificate
active
06501685
ABSTRACT:
BACKGROUND OF INVENTION
1. Field of the Invention
The present invention relates to a nonvolatile memory cell, and more particularly, to a channel write/erase flash memory cell and its manufacturing method.
2. Description of the Related Art
Please refer to FIG.
1
.
FIG. 1
is a cross-sectional view of a conventional flash memory cell
10
. It includes a substrate
11
, a first field oxide layer
12
, a stacked gate
14
, an N-type doping region
16
, a shallow P-type doping region
18
, a deep P-type doping region
20
, and a source region
22
.
The stacked gate
14
includes a control gate
13
and a floating gate
15
under the control gate
13
. The N-type doping region
16
is formed between the first field oxide layer
12
and the stacked gate
14
. The shallow P-type doping region
18
is formed next to the N-type doping region
16
and under the stacked gate
14
. The deep P-type doping region
20
and the shallow P-type region
18
are doped with the same type of dopants. The deep P-type doping region
20
is formed under the N-type doping region
16
and is in contact with the first field oxide layer
12
and also the shallow P-type doping region
18
. The deep P-type doping region
20
functions as a P well and its well depth is much deeper than the well depth of the shallow P-type doping region
18
. The deep P-type doping region
20
and the N-type doping region
16
are electrically connected which functions as a drain terminal of the flash memory cell
10
. The source region
22
, functioning as a source terminal of the flash memory cell
10
, is formed next to the shallow P-type region
18
. Additionally, under the source region
22
a lightly doped region
24
is formed which is doped with the same type of dopants like the source region
22
but with a lighter density.
The programming method of the flash memory cell
10
will be explained below. When programming the flash memory cell
10
, a word line voltage V
WL
=−10 V is applied to the control gate
13
, a bit line voltage V
BL
=5 V is applied to the drain terminal, i.e. the shorted N-type doping region
16
and the deep P-type doping region
20
, and no voltage is applied to the source terminal
22
so as to make it floating. Under this programming condition, electrons will eject from the floating gate
15
to the drain terminal due to the edge Fowler-Nordheim effect thereby achieving the effect of programming the flash memory cell
10
.
However, in the above conventional programming method, a series of flash memory cells are programmed in a cell-by-cell sequence. As shown in
FIG. 2
, two flash memory cells
30
and
32
arranged in parallel are shown. Typically, it takes about 4ms to complete the programming of one flash memory cell when a bit line voltage V
BL
=5 V is applied to the flash memory cells
30
and
32
. If
10
parallel flash memory cells are to be programmed, it will take 40 ms (10*4 ms) to complete the programming job. It means a great deal of time is needed when using the conventional programming method. Consequently, there is a need to provide a more effective flash memory structure and programming method.
SUMMARY OF INVENTION
Accordingly, it is the primary objective of the present invention to provide a new channel write/erase flash memory cell structure and also a new programming method.
In another aspect, the present invention provides a programming method in which a parasitic capacitor is used to temporally store bit line data to significantly increase the programming speed.
In one further aspect, the present invention provides a method of forming the aforementioned channel write/erase flash memory cell structure.
To achieve these and other advantages and in accordance with the purpose of the claimed invention, as embodied and broadly described herein, the present invention provides a channel write/erase flash memory cell structure capable of providing a pseudo-dynamic programming method. The structure includes a substrate of first conductivity type, a deep ion well of second conductivity type, an ion well of first conductivity type, a first oxide layer, a stacked gate, a doping region of first conductivity type, a shallow doping region of second conductivity type, and a deep doping region of second conductivity type.
The deep ion well of second conductivity type is formed in the substrate. The ion well of first conductivity type is positioned above the deep ion well of second conductivity type to create a parasitic capacitor during programming. The first oxide layer is formed on the substrate above the ion well of first conductivity type. The stacked gate is formed next to the first oxide layer and over the ion well of first conductivity type. The doping region of first conductivity type is positioned under the first oxide layer and on one side of the stacked gate to function as a drain. The shallow doping region of second conductivity type is formed next to the doping region of first conductivity type and under the stacked gate. The deep doping region of second conductivity type is positioned under the doping region of first conductivity type and is in contact with the shallow doping region of second conductivity type.
In the preferred embodiment of the present invention, the first conductivity type is N type and the second conductivity type is P type. The first oxide layer extends into the stacked gate with a decreasing oxide thickness for reducing interference during operation.
Further, a source doping region is formed next to the shallow doping region of second conductivity type and under the first oxide layer to function as a source terminal. The doping region of first conductivity type and the source doping region are doped with VA elements such as phosphorus. The shallow doping region of second conductivity type and the deep doping region of second conductivity type are both doped with IIIA elements such as boron.
Furthermore, the doping region of first conductivity type and the deep doping region of second conductivity type are short-circuited together by using, for example, a metal contact penetrating through the doping region of first conductivity type to the deep doping region of second conductivity type, or, alternatively, by using a metal contact formed across exposed doping region of first conductivity type and the deep doping region of second conductivity type.
Additionally, the present invention provides a method of forming a channel write/erase flash memory cell capable of performing a pseudo-dynamic programming method. The structure is formed by providing a substrate of first conductivity type, and then forming a deep ion well in the substrate. Next, an ion well of first conductivity type is formed in the deep ion well of second conductivity type. A first oxide layer is then formed over the ion well of first conductivity type. A stacked gate is formed later partially over the first oxide layer. A doping region of first conductivity type acting as a drain is formed under the first oxide layer and next to the stacked gate. A shallow doping region of second conductivity type is formed next to the doping region of first conductivity type and under the stacked gate. A deep doping region of second conductivity type is formed under the doping region of first conductivity type and is in contact with the shallow doping region of second conductivity type.
The method according to the present invention further includes a source doping region acting as a source terminal formed next to the shallow doping region of conductivity type and under the first oxide layer. A metal contact is formed to short-circuit the doping region of first conductivity type and the deep doping region of second conductivity type. Or, a metal contact can be formed across the exposed doping region of first conductivity type and the deep doping region of second conductivity type so that these two regions can be short-circuited together. In one preferred embodiment according to the present invention, the substrate and the ion well of first conductivity type are both doped with N
Hsu Ching-Hsiang
Yang Ching-Sung
e-Memory Technology, Inc.
Hsu Winston
Phan Trong
LandOfFree
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