Chamber particle detection system

Details Chamber particle detection system Chamber particle detection system

2008-07-17

2009-12-01

Toatley, Jr., Gregory J (Department: 2877)

Optics: measuring and testing

By particle light scattering

C356S343000

Reexamination Certificate

active

07626699

ABSTRACT:
Embodiments of the present invention provide an apparatus and a method for chamber particle source identification. The chamber particle source identification method and apparatus can greatly shorten the time it takes to identify chamber particle source(s). In one embodiment, a chamber particle monitor assembly for a processing chamber is provided. The chamber particle monitor assembly includes at least one laser light source, which can scan laser light in a chamber process volume within the processing chamber. The chamber particle monitor assembly also includes a plurality of laser light collectors, which can collect laser light emitted from the at least one laser light source continuously to monitor particle performance within the processing chamber. The plurality of laser light collectors are placed in the processing chamber such that none of the plurality of laser light collectors share a common axis. The chamber particle monitor assembly further includes an analyzer that analyzes signals representing the laser light collected by the plurality of laser light collectors to provide chamber particle information. The plurality of laser light collectors enables construction of three-dimensional (3-D) images of particle distribution within the processing volume.

REFERENCES:
patent: 7417733 (2008-08-01), Wright
patent: 2003/0054655 (2003-03-01), Nakano et al.

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