Chamber interfacing O-rings and method for implementing same

Details Chamber interfacing O-rings and method for implementing same Chamber interfacing O-rings and method for implementing same

1997-06-27

2000-01-04

Knight, Anthony

Seal for a joint or juncture

Process of static sealing

277643, F16J 1500

Patent

active

060101334

ABSTRACT:
Disclosed is a method for implementing a vacuum seal between an interface of a transport chamber interface port of a transport chamber and another chamber. The transport chamber being configured to mate with the another chamber in an adjacent relationship. The method includes placing an insert plate having a sealing surface containing a first O-ring into the transport chamber interface port such that the first O-ring is sandwiched between the sealing surface and a surface of the another chamber. Therefore, a vacuum seal is achieved between the transport chamber and the another chamber within the transport chamber interface port via the first O-ring.

REFERENCES:
patent: 3789875 (1974-02-01), McGee
patent: 4340462 (1982-07-01), Koch
patent: 4355937 (1982-10-01), Mack et al.
patent: 4433951 (1984-02-01), Koch et al.
patent: 4483654 (1984-11-01), Koch et al.
patent: 4593915 (1986-06-01), Seger et al.
patent: 4753417 (1988-06-01), Madocks et al.
patent: 4795299 (1989-01-01), Boys et al.
patent: 4804086 (1989-02-01), Grohrock
patent: 4917556 (1990-04-01), Stark et al.
patent: 5002255 (1991-03-01), Sawa et al.
patent: 5100276 (1992-03-01), Iwasaki et al.
patent: 5120019 (1992-06-01), Davis, Jr.
patent: 5150882 (1992-09-01), Kaneko
patent: 5295522 (1994-03-01), DeAngelis et al.
patent: 5344542 (1994-09-01), Maher et al.
patent: 5383338 (1995-01-01), Bowsky et al.
patent: 5697750 (1997-12-01), Fishkin et al.
patent: 5730573 (1998-03-01), Masujima et al.

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