Chamber etching of plasma processing apparatus

Etching a substrate: processes – Etching and coating occur in the same processing chamber

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118625, 134 11, 134 221, 156345, 427569, 438905, B05D 314

Patent

active

060997478

ABSTRACT:
A plasma processing apparatus and method in which a counter electrode is connected to a high frequency power source to generate a plasma and the substrate electrode is grounded and in which the substrate electrode is connected to a high frequency power source and the counter electrode is grounded to perform chamber etching.

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patent: 5705019 (1998-01-01), Yamada et al.

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