Cesium hydroxide etch of a semiconductor crystal

Details Cesium hydroxide etch of a semiconductor crystal Cesium hydroxide etch of a semiconductor crystal

1990-12-07

1992-05-26

Wityshyn, Michael G.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

1566571, 156656, 156657, 252 795, C09K 1302

Patent

active

051164647

ABSTRACT:
An aqueous solution of cesium hydroxide serves as a highly selective anisotropic etch for semiconductor crystals including silicon. The cesium hydroxide also has a high etch selectivity for tantalum with respect to semiconductor crystals.

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