Ceramic susceptor with embedded metal electrode and eutectic con

Details Ceramic susceptor with embedded metal electrode and eutectic con Ceramic susceptor with embedded metal electrode and eutectic con

1995-07-14

1997-05-27

Ryan, Patrick

Stock material or miscellaneous articles

Structurally defined web or sheet

Discontinuous or differential coating, impregnation or bond

219385, 156 89, 156293, 2281245, B32B 900

Patent

active

056330731

ABSTRACT:
A ceramic susceptor with an embedded metal electrode. The metal electrode has multiple apertures, and the ceramic material is cross-linked through the apertures. An electrical connection to the electrode protects the electrode from the environment in the processing chamber. The ceramic may be aluminum nitride, and the metal electrode may be a mesh of molybdenum wires. To form the electrical connection, the susceptor may be heated until an eutectic forms between a conductive connector and the metal electrode. Alternately, a brazing material may be placed between the metal layer and a conductive connector.

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patent: 5306895 (1994-04-01), Ushikoshi et al.
NGK Insulators, Ltd., "Ceramic Wafer Heaters," (Information Bulletin) 4 pages.

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