Ceramic susceptor with embedded metal electrode and brazing mate

Details Ceramic susceptor with embedded metal electrode and brazing mate Ceramic susceptor with embedded metal electrode and brazing mate

1996-01-24

1998-10-06

Lam, Cathy F.

Stock material or miscellaneous articles

Structurally defined web or sheet

Discontinuous or differential coating, impregnation or bond

2281245, 156 89, 156 91, 219385, 219634, 219649, 219759, 219774, H05B 610, B32B 300

Patent

active

058174060

ABSTRACT:
A ceramic susceptor with an embedded metal electrode. The metal electrode has multiple apertures, and the ceramic material is cross-linked through the apertures. An electrical connection to the electrode protects the electrode from the environment in the processing chamber. The ceramic may be aluminum nitride, and the metal electrode may be a mesh of molybdenum wires. To form the electrical connection, the susceptor may be heated until an eutectic forms between a conductive connector and the metal electrode. Alternately, a brazing material may be placed between the metal layer and a conductive connector.

REFERENCES:
patent: 4699310 (1987-10-01), Kohno et al.
patent: 4749118 (1988-06-01), Yokoi et al.
patent: 5158659 (1992-10-01), Suzuki et al.
patent: 5231690 (1993-07-01), Soma et al.
patent: 5280156 (1994-01-01), Niori et al.
patent: 5306895 (1994-04-01), Ushikoshi et al.
"Ceramic Wafer Heaters," NGK Insulators, Ltd., Nagoya 487, Japan.

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