Ceramic setter plate and manufacturing method thereof

Heating – Accessory means for holding – shielding or supporting work... – Support structure for heat treating ceramics

Reexamination Certificate

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C264S629000, C264S630000

Reexamination Certificate

active

07008220

ABSTRACT:
In a ceramic setter plate10of a plate-shaped sintered body12of a non-oxide ceramic material formed by firing ceramic particles11of at least one selected from the group consisting of SiC, Si3N4, BN, AlN, MoSi2, TiN and ZrB2, the sintered body12is composed of a porous body12having interconnected pores15and one or more cavities13inside thereof in substantially the center in the thickness direction of thereof, at least one of the cavities13has therein one or a plurality of branched parts17, the cavities13have opening parts14at side parts of the sintered body12. The ceramic setter plate has good gas permeability for firing a laminate of ceramic green sheets, for which the firing efficiency is good, and for which repeated use is possible.

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patent: 2002-134913 (2002-05-01), None

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