Heat exchange – With retainer for removable article – Electrical component
Patent
1995-11-30
1999-04-20
Lazarus, Ira S.
Heat exchange
With retainer for removable article
Electrical component
165 801, 16510426, 165169, 118724, 118725, F28F 700
Patent
active
058948872
ABSTRACT:
This invention relates to a structure and method for using heat pipe technology in combination with a ceramic dome of a vacuum processing chamber to help maintain the uniformity of temperature in the dome and avoid differences in temperature in the dome which may cause deleterious flaking of process deposition, or allow elevated temperatures in the dome to cause premature wear of the material. A heat pipe can be in thermal contact with the dome (process chamber surface) or can actually be part of the heat pipe/dome structure.
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Kelsey Shannon J.
Salzman Philip M.
Applied Materials Inc.
Atkinson Christopher
Biksa Janis
Lazarus Ira S.
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