Coating processes – Centrifugal force utilized
Reexamination Certificate
2008-10-08
2010-10-19
Jolley, Kirsten C (Department: 1715)
Coating processes
Centrifugal force utilized
C427S256000, C427S282000, C427S287000, C427S294000, C427S346000, C427S356000, C427S368000, C427S425000, C118S050000, C118S052000, C118S054000, C118S057000, C118S107000, C118S301000, C118S320000
Reexamination Certificate
active
07815968
ABSTRACT:
The present disclosure relates generally to semiconductor, integrated circuits, and particularly, but not by way of limitation, to centrifugal methods of filling high-aspect ratio vias and trenches with powders, pastes, suspensions of materials to act as any of a conducting, structural support, or protective member of an electronic component.
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Buchwalter Leena Paivikki
Buchwalter Stephen L.
Casey Jon
Feger Claudius
Flotta Matteo
Connolly Bove & Lodge & Hutz LLP
International Business Machines - Corporation
Jolley Kirsten C
Morris Daniel P.
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