CCD imager responsive to long wavelength radiation

Details CCD imager responsive to long wavelength radiation CCD imager responsive to long wavelength radiation

1992-05-29

1993-10-12

Kunemund, Robert

Fishing, trapping, and vermin destroying

437 50, 437 67, 437 79, 437203, 156645, 257215, 257242, 257244, H01L 2170, H01L 2700

Patent

active

052525090

ABSTRACT:
An infrared or x-ray imaging CCD array, including deep trench isolation (56) for capturing electron carriers formed deep in the substrate (46) as a result of long wavelength radiation or high energy particles. In virtual phase CCD circuits, the trench has formed on the sidewalls thereof a diffusion (58, 60) defining a vertical conductor for allowing hole carrier conduction between the substrate (46) and the virtual phase electrode (38).

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patent: 4784720 (1988-11-01), Douglas
patent: 4857981 (1989-08-01), Matsumoto et al.
patent: 4861729 (1989-08-01), Fuse et al.
patent: 4878102 (1989-10-01), Bakker et al.

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