Cavitational polishing pad conditioner

Details Cavitational polishing pad conditioner Cavitational polishing pad conditioner

1999-08-04

2000-11-21

Scherbel, David A.

Abrading

Abrading process

With tool treating or forming

451 36, 451 41, 451285, B24B 100

Patent

active

061495050

ABSTRACT:
A chemical mechanical polishing system comprising a moving polishing pad and an ultrasonic conditioning head. The head is positioned in close facing relationship to the pad surface and agitates a liquid on the rotating pad surface at an appropriate frequency and sufficient amplitude to produce cavitation of the slurry in the vicinity of the pad surface. The action of cavitational collapse vigorously conditions the pad, driving out contaminants and re-texturizing the pad.

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