Cavitational polishing pad conditioner

Details Cavitational polishing pad conditioner Cavitational polishing pad conditioner

1997-08-29

1999-09-28

Scherbel, David A.

Abrading

Abrading process

Glass or stone abrading

451 36, 451 56, 451285, B24B 100

Patent

active

059577541

ABSTRACT:
A chemical mechanical polishing system comprising a moving polishing pad and an ultrasonic conditioning head. The head is positioned in close facing relationship to the pad surface and agitates a liquid on the rotating pad surface at an appropriate frequency and sufficient amplitude to produce cavitation of the slurry in the vicinity of the pad surface. The action of cavitational collapse vigorously conditions the pad, driving out contaminants and re-texturizing the pad.

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