Catadioptric projection objective

Details Catadioptric projection objective Catadioptric projection objective

2007-04-10

2007-04-10

Thompson, Timothy (Department: 2873)

Optical: systems and elements

Lens

With reflecting element

C359S727000, C355S053000

Reexamination Certificate

active

11036155

ABSTRACT:
A catadioptric projection objective which images a pattern arranged in an object plane of the projection objective into the image plane of the projection objective while generating a real intermediate image has a catadioptric objective part having at least one concave mirror and a beam deflecting device and also a dioptric objective part. The imaging system has a system diaphragm having a variable diaphragm diameter for variably limiting the cross section of the radiation passing through the projection objective. This system diaphragm is arranged in the catadioptric objective part, preferably in direct proximity to the concave mirror. The invention enables a projection objective with a simple construction.

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patent: 2003/0179356 (2003-09-01), Schuster et al.
patent: 2006/0055907 (2006-03-01), Kato et al.

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