Catadioptric projection objective

Details Catadioptric projection objective Catadioptric projection objective

2006-08-29

2006-08-29

Sugarman, Scott J. (Department: 2873)

Optical: systems and elements

Single channel simultaneously to or from plural channels

By partial reflection at beam splitting or combining surface

C359S726000

Reexamination Certificate

active

07099087

ABSTRACT:
There is provided a catadioptric projection objective that includes (a) an object plane having a rectangular object field, and (b) a beam splitter situated in a light path after the object plane, having a rectangular surface adapted to the object field and having an aspect ratio not equal to 1.

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