Cassette loader having compound translational motion

Details Cassette loader having compound translational motion Cassette loader having compound translational motion

1994-08-17

1996-06-11

Keenan, James W.

Material or article handling

Device for emptying portable receptacle

Nongravity type

414217, 414786, 414940, B65G 4907

Patent

active

055250246

ABSTRACT:
A cassette loading mechanism for semiconductor processing equipment reduces the possibility of repetitive stress injury that may occur as a result of repeatedly loading and unloading a cassette of substrates by eliminating manual cassette rotation. The loader receives a cassette and, by compound translational movement, rotates the cassette about 90.degree. from a horizontal loading position, in which the substrates contained therein are positioned in a vertical orientation, to a position in which the substrates contained therein are positioned in a horizontal orientation, such that the cassette is aligned to the other components of the substrate handling system for substrate transfer. The cassette motions are interlocked with the cassette clamping mechanism and the cassette loader door and a cassette shuttle by pneumatic or electronic logic.

REFERENCES:
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patent: 4744715 (1988-05-01), Kawabata
patent: 4836733 (1989-06-01), Hertel et al.
patent: 4859137 (1989-08-01), Bonora et al.
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patent: 4963069 (1990-10-01), Wurst et al.
patent: 5048164 (1991-09-01), Harima
patent: 5181819 (1993-01-01), Sakata
patent: 5186594 (1993-02-01), Toshima et al.
patent: 5443348 (1995-08-01), Biche et al.

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