Registers – Systems controlled by data bearing records – Mechanized store
Patent
1996-07-08
1999-11-09
Hajec, Donald
Registers
Systems controlled by data bearing records
Mechanized store
23546213, G06K 1500
Patent
active
059797568
ABSTRACT:
A wafer cassette, a method for manufacturing the cassette, and equipment for semiconductor fabrication are provided. The cassette includes a container for containing wafers, a bar-code wing projecting outward from at least one of the front walls and sidewalls of the container, and a bar code formed on the surface of the bar-code wing. A bar code reader for identifying the bar codes of the cassette is provided below the upper plane of the loader/unloader portion of the equipment for semiconductor fabrication. Accordingly, an efficient loading/unloading operation of a cassette onto/from the loader/unloader portion of the equipment is enabled, wafer damage is reduced, and productivity of the manufactured semiconductor device is improved.
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Ahn Chung-sam
Lim Yong-il
Frech Karl D.
Hajec Donald
Samsung Electronics Co,. Ltd.
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