Carrier ring for carrier head

Details Carrier ring for carrier head Carrier ring for carrier head

2011-03-08

2011-03-08

Eley, Timothy V (Department: 3723)

Abrading

Accessory

C451S288000, C451S398000

Reexamination Certificate

active

07901273

ABSTRACT:
A carrier head that has a base assembly, a retaining ring assembly, a carrier ring, and a flexible membrane is described. A carrier ring has an annular upper portion and an annular lower portion having a lower surface with a smaller inner diameter than the upper surface of the annular upper portion, wherein the carrier ring circumferentially surrounds a retaining ring and has a lower surface to contact a polishing pad.

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Ron Weber, Authorized Officer, Australian Patent Office, Written Opinion of SG Application No. SG 200717954-2 mailed Mar. 25, 2010, 9 pages.

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