Carrier head with non-contact retainer

Details Carrier head with non-contact retainer Carrier head with non-contact retainer

2005-03-29

2005-03-29

Nguyen, Dung Van (Department: 3723)

Abrading

Machine

Rotary tool

C451S398000

Reexamination Certificate

active

06872130

ABSTRACT:
A carrier head for chemical mechanical polishing of a substrate has a base and a retaining ring positioned beneath the base. The retaining ring includes a main portion with a first surface to apply a load to a perimeter portion of the back surface of the substrate and an annular projection with a second surface to retain the substrate. A bottom surface of the projection is separated from a top surface of a polishing pad by a gap.

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