Carrier head with layer of conformable material for a chemical m

Details Carrier head with layer of conformable material for a chemical m Carrier head with layer of conformable material for a chemical m

1996-10-10

2000-03-14

Rose, Robert A.

Abrading

Machine

Rotary tool

451398, 451388, B24B 722

Patent

active

060365870

ABSTRACT:
A carrier head for a chemical mechanical polishing apparatus. A layer of conformable material is disposed in a recess of the carrier head to provide a mounting surface for a substrate. The conformable material may be elastic and undergo normal strain in response to an applied load. The carrier head may also include a support fixture detachably connected to a backing fixture, a retaining ring connected directly to the conformable material, and a shield ring which projects over a portion of the layer of conformable material.

REFERENCES:
patent: 4132037 (1979-01-01), Bonora
patent: 4270316 (1981-06-01), Kramer et al.
patent: 4373991 (1983-02-01), Banks
patent: 4519168 (1985-05-01), Cesna
patent: 4669226 (1987-06-01), Mandler
patent: 4918869 (1990-04-01), Kitta
patent: 4954142 (1990-09-01), Carr et al.
patent: 5081795 (1992-01-01), Tamaka et al.
patent: 5193316 (1993-03-01), Olmstead
patent: 5205082 (1993-04-01), Shendon et al.
patent: 5230184 (1993-07-01), Bukhman
patent: 5255474 (1993-10-01), Gawa et al.
patent: 5423558 (1995-06-01), Koeth et al.
patent: 5423716 (1995-06-01), Strasbau
patent: 5441444 (1995-08-01), Nakajima
patent: 5443416 (1995-08-01), Volodarsky et al.
patent: 5449316 (1995-09-01), Strasbaugh
patent: 5584746 (1996-12-01), Tanaka et al.
patent: 5624299 (1997-04-01), Shendon
patent: 5733182 (1998-03-01), Muramatsu et al.
Holley, et al.; Mounting Method For Single-Side Polishing; IBM Technical Disclosure Bulletin, vol. 21, No. 10, Mar. 1979.

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