Carrier head with a retaining ring for a chemical mechanical pol

Details Carrier head with a retaining ring for a chemical mechanical pol Carrier head with a retaining ring for a chemical mechanical pol

1998-05-14

2000-11-07

Lund, Jeffrie R

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

451285, 451286, 451287, B24B 500, B24B 2900

Patent

active

061431273

ABSTRACT:
A carrier head for chemical mechanical polishing with a retaining ring having an inclined inner surface. The force of the edge of the substrate against the inclined surface causes a reactive force having a vertical component on the edge of the substrate. This vertical force can reduce the edge effect.

REFERENCES:
patent: 5205082 (1993-04-01), Shendon et al.
patent: 5398459 (1995-03-01), Okumura et al.
patent: 5423716 (1995-06-01), Strasbaugh
patent: 5441444 (1995-08-01), Nakajima
patent: 5584746 (1996-12-01), Tanaka et al.
patent: 5584751 (1996-12-01), Kobayashi et al.
patent: 5635083 (1997-06-01), Breivogel et al.

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