Carrier head for thermal drift compensation

Details Carrier head for thermal drift compensation Carrier head for thermal drift compensation

2006-09-05

2006-09-05

Wilson, Lee D. (Department: 3723)

Abrading

Machine

Rotary tool

C451S285000, C451S290000, C438S692000

Reexamination Certificate

active

07101272

ABSTRACT:
Systems and apparatus providing a carrier head for chemical mechanical polishing are described. The carrier head includes a base, a support structure attached to the base, a retaining structure attached to the base, and a connector attached to the base and the retaining structure. The support structure includes a receiving surface for contacting a substrate. The retaining structure prevents the substrate from moving along the receiving surface. The base and the retaining structure can thermally expand at different rates of expansion without causing distortion to one another.

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