Carrier head for chemical mechanical polishing

Details Carrier head for chemical mechanical polishing Carrier head for chemical mechanical polishing

1998-12-09

2000-12-26

Hail, III, Joseph J.

Abrading

Machine

Rotary tool

451288, 451398, B24B 3704

Patent

active

061650587

ABSTRACT:
A carrier head for a chemical mechanical polishing apparatus includes a base, a flexible membrane extending beneath the base to provide a mounting surface for a substrate, and a retaining ring surrounding the mounting surface. An edge portion of the flexible membrane extends around an outer surface of a support structure. An outer surface of the support structure is tapered to reduce binding between the flexible membrane and the retaining ring. Alternately, there may be a relatively wide gap between the support structure and the retaining ring, or a sidewall portion of the flexible membrane may be reinforced.

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