Carrier head for chemical mechanical polishing

Details Carrier head for chemical mechanical polishing Carrier head for chemical mechanical polishing

1999-01-23

2000-12-19

Morgan, Eileen P.

Abrading

Machine

Rotary tool

451397, 451398, 451288, B24B 500

Patent

active

061621161

ABSTRACT:
A carrier head for a chemical mechanical polishing apparatus includes a base and a flexible membrane extending beneath the base to define a pressurizable chamber. The flexible membrane may be secured to the base, to a retaining ring surrounding the mounting surface, or to a support structure movably connected to the base by, for example, an adhesive, an O-ring seal, a sealant, or by fitting the membrane into a recess. A lower surface of the flexible membrane provides a mounting surface for a substrate.

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patent: 5879220 (1999-03-01), Hasegawa et al.
patent: 5957751 (1999-09-01), Govzman et al.
patent: 5964653 (1999-10-01), Perlov et al.

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