Carrier for semiconductive wafers

Details Carrier for semiconductive wafers Carrier for semiconductive wafers

1979-02-21

1980-10-21

Frazier, Roy D.

Supports: racks

Special article

Platelike

118500, 206454, 294 87R, 432258, B23P 1700, A47G 1902

Patent

active

042289025

ABSTRACT:
A carrier having a plurality of transport channels arranged in stacked parallel relationship for receiving semiconductive wafers is provided with a pair of oppositely facing recessed regions extending partially into the transport channels. In each of these recessed regions a stop member is pivotally mounted and spring-loaded for automatic movement between an inoperative position out of the transport channels to permit passage of the semiconductive wafers therethrough, when the carrier is set down, and an operative position protruding into the transport channels and blocking passage of the semiconductive wafers therethrough to impede spillage of any semiconductive wafers contained in the carrier, when the carrier is picked up.

REFERENCES:
patent: 3877134 (1975-04-01), Shanahan
patent: 3926305 (1975-12-01), Wallestad
patent: 4053294 (1977-10-01), Sullivan
patent: 4153164 (1979-05-01), Hofmeister et al.

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