Carrier for reducing entrance and/or exit marks left by a...

Details Carrier for reducing entrance and/or exit marks left by a... Carrier for reducing entrance and/or exit marks left by a...

2011-05-24

2011-05-24

Kornakov, Michael (Department: 1714)

Cleaning and liquid contact with solids

Apparatus

With means to movably mount or movably support the work or...

C134S902000, C269S287000, C269S900000, C269S902000

Reexamination Certificate

active

07946303

ABSTRACT:
A carrier for supporting a substrate during processing by a meniscus formed by upper and lower proximity heads is described. The carrier includes a frame having an opening sized for receiving a substrate and a plurality of support pins for supporting the substrate within the opening. The opening is slightly larger than the substrate such that a gap exists between the substrate and the opening. Means for reducing a size and frequency of entrance and/or exit marks on substrates is provided, the means aiding and encouraging liquid from the meniscus to evacuate the gap. A method for reducing the size and frequency of entrance and exit marks is also provided.

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