Carrier and polishing apparatus

Details Carrier and polishing apparatus Carrier and polishing apparatus

1999-03-24

2000-08-29

Scherbel, David A.

Abrading

Machine

Rotary tool

451286, B24B 100

Patent

active

061100269

ABSTRACT:
A carrier and polishing apparatus enabling high precision polishing of a workpiece and enabling prevention of leak contamination and damage to the workpiece. A carrier 1 is provided with a carrier body 2, a pressure chamber 3, and a fluid passage portion 4 and a plurality of valve portions 5 are specially provided in the pressure chamber 3. Due to this, when the inside of the pressure chamber 3 becomes a negative pressure state, the valve portions 5 open and the wafer W is picked up by suction, while when it becomes a positive pressure state, the valve portions 5 close and the air in the pressure chamber 3 uniformly presses against the wafer W. Further, since the valve portions 5 close in the positive pressure state, the air in the pressure chamber 3 will not flow to the outside.

REFERENCES:
patent: 5205082 (1993-04-01), Shendon et al.
patent: 5398459 (1995-03-01), Okumura et al.
patent: 5423716 (1995-06-01), Strasbaugh
patent: 5584746 (1996-12-01), Tanaka et al.
patent: 5624299 (1997-04-01), Shendon

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