Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate
2006-09-19
2008-11-04
Pham, Thanh V (Department: 2823)
Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
To form ohmic contact to semiconductive material
C438S685000, C438S903000, C438S508000, C257S382000, C257S383000, C977S876000, C977S938000, C333S193000
Reexamination Certificate
active
07446044
ABSTRACT:
Switches having an in situ grown carbon nanotube as an element thereof, and methods of fabricating such switches. A carbon nanotube is grown in situ in mechanical connection with a conductive substrate, such as a heavily doped silicon wafer or an SOI wafer. The carbon nanotube is electrically connected at one location to a terminal. At another location of the carbon nanotube there is situated a pull electrode that can be used to elecrostatically displace the carbon nanotube so that it selectively makes contact with either the pull electrode or with a contact electrode. Connection to the pull electrode is sufficient to operate the device as a simple switch, while connection to a contact electrode is useful to operate the device in a manner analogous to a relay. In various embodiments, the devices disclosed are useful as at least switches for various signals, multi-state memory, computational devices, and multiplexers.
REFERENCES:
patent: 6574130 (2003-06-01), Segal et al.
patent: 6643165 (2003-11-01), Segal et al.
patent: 6682677 (2004-01-01), Lobovsky et al.
patent: 6706402 (2004-03-01), Rueckes et al.
patent: 6759693 (2004-07-01), Vogeli et al.
patent: 6764628 (2004-07-01), Lobovsky et al.
patent: 6774052 (2004-08-01), Vogeli et al.
patent: 6784028 (2004-08-01), Rueckes et al.
patent: 6803725 (2004-10-01), Jin
patent: 6835591 (2004-12-01), Rueckes et al.
patent: 6836424 (2004-12-01), Segal et al.
patent: 6875374 (2005-04-01), Zhan et al.
patent: 6911682 (2005-06-01), Rueckes et al.
patent: 6919592 (2005-07-01), Segal et al.
patent: 6924538 (2005-08-01), Jaiprakash et al.
patent: 6942921 (2005-09-01), Rueckes et al.
patent: 6944054 (2005-09-01), Rueckes et al.
patent: 6979590 (2005-12-01), Rueckes et al.
patent: 6982903 (2006-01-01), Bertin et al.
patent: 6990009 (2006-01-01), Bertin et al.
patent: 6995046 (2006-02-01), Rueckes et al.
patent: 7045421 (2006-05-01), Rueckes et al.
patent: 7056758 (2006-06-01), Segal et al.
patent: 7071023 (2006-07-01), Bertin et al.
patent: 7075141 (2006-07-01), Rueckes et al.
patent: 7112464 (2006-09-01), Jaiprakash et al.
patent: 7112493 (2006-09-01), Bertin et al.
patent: 7113426 (2006-09-01), Rueckes et al.
patent: 7115901 (2006-10-01), Bertin et al.
patent: 7115960 (2006-10-01), Bertin et al.
patent: 7138832 (2006-11-01), Bertin et al.
patent: 2002/0113335 (2002-08-01), Lobovsky et al.
patent: 2003/0165074 (2003-09-01), Segal et al.
patent: 2003/0165648 (2003-09-01), Lobovsky et al.
patent: 2003/0234407 (2003-12-01), Vogeli et al.
patent: 2003/0236000 (2003-12-01), Vogeli et al.
patent: 2004/0075159 (2004-04-01), Vogeli
patent: 2004/0075379 (2004-04-01), Jin
patent: 2004/0077107 (2004-04-01), Vogeli
patent: 2004/0085805 (2004-05-01), Segal et al.
patent: 2004/0087162 (2004-05-01), Vogeli
patent: 2004/0096389 (2004-05-01), Lobovsky et al.
patent: 2004/0108550 (2004-06-01), Jin
patent: 2004/0159833 (2004-08-01), Rueckes et al.
patent: 2004/0164289 (2004-08-01), Rueckes et al.
patent: 2004/0175856 (2004-09-01), Jaiprakash et al.
patent: 2004/0181630 (2004-09-01), Jaiprakash et al.
patent: 2004/0191978 (2004-09-01), Rueckes et al.
patent: 2004/0214366 (2004-10-01), Segal et al.
patent: 2004/0214367 (2004-10-01), Segal et al.
patent: 2005/0035344 (2005-02-01), Bertin et al.
patent: 2005/0035367 (2005-02-01), Bertin et al.
patent: 2005/0035786 (2005-02-01), Bertin et al.
patent: 2005/0035787 (2005-02-01), Bertin et al.
patent: 2005/0036365 (2005-02-01), Bertin et al.
patent: 2005/0037547 (2005-02-01), Bertin et al.
patent: 2005/0041465 (2005-02-01), Rueckes et al.
patent: 2005/0041466 (2005-02-01), Rueckes et al.
patent: 2005/0047244 (2005-03-01), Rueckes et al.
patent: 2005/0052894 (2005-03-01), Segal et al.
patent: 2005/0053525 (2005-03-01), Segal et al.
patent: 2005/0054128 (2005-03-01), Gasparyan et al.
patent: 2005/0056825 (2005-03-01), Bertin et al.
patent: 2005/0056866 (2005-03-01), Bertin et al.
patent: 2005/0056877 (2005-03-01), Rueckes et al.
patent: 2005/0058590 (2005-03-01), Sen et al.
patent: 2005/0058797 (2005-03-01), Sen et al.
patent: 2005/0058834 (2005-03-01), Rueckes et al.
patent: 2005/0059176 (2005-03-01), Rueckes et al.
patent: 2005/0059210 (2005-03-01), Rueckes et al.
patent: 2005/0062035 (2005-03-01), Bertin et al.
patent: 2005/0062062 (2005-03-01), Bertin et al.
patent: 2005/0062070 (2005-03-01), Bertin et al.
patent: 2005/0063210 (2005-03-01), Segal et al.
patent: 2005/0063244 (2005-03-01), Bertin et al.
patent: 2005/0065741 (2005-03-01), Segal et al.
patent: 2005/0067607 (2005-03-01), Zhan et al.
patent: 2005/0074569 (2005-04-01), Lobovsky et al.
patent: 2005/0074926 (2005-04-01), Bertin et al.
patent: 2005/0101112 (2005-05-01), Rueckes et al.
patent: 2005/0128788 (2005-06-01), Segal et al.
patent: 2005/0174842 (2005-08-01), Bertin et al.
patent: 2005/0191495 (2005-09-01), Rueckes et al.
patent: 2005/0237781 (2005-10-01), Bertin et al.
patent: 2005/0269553 (2005-12-01), Sen et al.
patent: 2005/0269554 (2005-12-01), Sen et al.
patent: 2005/0270824 (2005-12-01), Bertin et al.
patent: 2005/0279988 (2005-12-01), Bertin
patent: 2005/0280436 (2005-12-01), Bertin
patent: 2005/0281084 (2005-12-01), Rueckes et al.
patent: 2005/0282515 (2005-12-01), Bertin
patent: 2005/0282516 (2005-12-01), Bertin
patent: 2006/0044035 (2006-03-01), Bertin
patent: 2006/0061389 (2006-03-01), Bertin
patent: 2006/0125033 (2006-06-01), Segal et al.
patent: 2006/0128049 (2006-06-01), Jaiprakash et al.
patent: 2006/0183278 (2006-08-01), Berin et al.
patent: 2006/0193093 (2006-08-01), Bertin et al.
patent: 2006/0204427 (2006-09-01), Ghenciu et al.
patent: 2006/0231865 (2006-10-01), Rueckes et al.
patent: 2006/0237857 (2006-10-01), Bertin et al.
patent: 2006/0250843 (2006-11-01), Bertin et al.
patent: 2006/0250856 (2006-11-01), Bertin et al.
patent: 2006/0255834 (2006-11-01), Bertin
patent: 2006/0276056 (2006-12-01), Ward et al.
Baron Richard L.
Epp Larry
Kaul Anupama B.
Wong Eric W.
California Institute of Technology
Hiscock & Barclay LLP
Milstein Joseph B.
Pham Thanh V
LandOfFree
Carbon nanotube switches for memory, RF communications and... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Carbon nanotube switches for memory, RF communications and..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Carbon nanotube switches for memory, RF communications and... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4026053